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题名/责任者:

Published search : Microlithography and microetching in semiconductor device manufacturing and processing (Jan 75 - Oct 86) : (citations from the INSPEC database).

出版发行项:

[Linden, N.J. : NTIS, 1986?]

载体形态项:

82, 43 p. : ill. ; 27 cm.

变异题名:

Microlithography and microetching in semiconductor device manufacturing and processing (Jan 75 - Oct 86) : (citations from the INSPEC database)

变异题名:

Citations from the INSPEC: Information Service for the Physics and Engineering Communities

附加团体名称:

U.S. Department of Commerce. National Technical Information Service.

中图法分类号:

TN305-63

一般附注:

Cover title.

一般附注:

"PB86-876836."

豆瓣简介：