安徽理工大学图书馆书目检索系统

Online Public Access Catalogue

题名/责任者:

Proceedings of the Symposium on Silicon Nitride Thin Insulating Films / edited by Vikram J. Kapoor, Herman J. Stein ; [sponsored by] Dielectrics and Insulation and Electronics Divisions.

出版发行项:

Pennington, N.J. : Electrochemical Society, c1983.

载体形态项:

ix, 519 p. : ill. ; 23 cm.

变异题名:

Symposium on Silicon Nitride Thin Insulating Films

变异题名:

Silicon nitride thin insulating films

丛编说明:

Proceedings ; v. 83-8

丛编统一题名:

Proceedings (Electrochemical Society) ; v. 83-8.

会议名称:

Symposium on Silicon Nitride Thin Insulating Films (1983 : San Francisco, Calif.)

附加个人名称:

Kapoor, Vikram J.

附加个人名称:

Stein, Herman J.

附加团体名称:

Electrochemical Society. Dielectrics and Insulation Division

附加团体名称:

Electrochemical Society. Electronics Division

论题主题:

Thin film devices-Congresses.

论题主题:

Silicon nitride-Congresses.

中图法分类号:

TM215.3-53

一般附注:

Papers presented at the symposium held May 11-13, 1983 in San Francisco, Calif.

书目附注:

Includes bibliographical references and index.

豆瓣简介：