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题名/责任者:

Ion implantation techniques : lectures given at the Ion Implantation School, in connection with the Fourth International Conference on Ion Implantation: Equipment and Techniques, Berchtesgaden, Fed. Rep. of Germany, September 13-15, 1982 / editors, H. Ryssel and H. Glawischnig.

出版发行项:

Berlin ; New York : Springer-Verlag, 1982.

ISBN:

0387118780 (U.S.)

ISBN:

3540118780

载体形态项:

xii, 372 p. : ill. ; 24 cm.

丛编题名:

Springer series in electrophysics ; v. 10

会议名称:

Ion Implantation School (1982 : Berchtesgaden, Germany)

附加个人名称:

Ryssel, Heiner, 1941-

附加个人名称:

Glawischnig, H. (Hans), 1939-

附加会议名称:

International Conference on Ion Implantation: Equipment and Techniques (4th : 1982 : Berchtesgaden, Germany)

论题主题:

Ion implantation.

论题主题:

Semiconductor doping.

中图法分类号:

TN305.3

书目附注:

Includes bibliographical references and index.

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