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题名/责任者:

ARPA/NBS workshop IV : surface analysis for silicon devices / [edited by] A. George Lieberman.

出版发行项:

Washington : U.S. Dept. of Commerce, National Bureau of Standards ; [for sale by the Supt. of Docs., Govt. Print. Off.], 1976.

载体形态项:

vii, 239 p. : ill. ; 27 cm.

变异题名:

ARPA/NBS workshop 4

变异题名:

ARPA/NBS workshop four

变异题名:

Surface analysis for silicon devices

丛编题名:

Semiconductor measurement technology

丛编说明:

NBS special publication ; 400-23

丛编统一题名:

NBS special publication ; 400-23.

团体责任者:

United States. National Bureau of Standards.

附加个人名称:

Lieberman, A. George (Alfred George), 1937-

附加团体名称:

United States. National Bureau of Standards.

附加团体名称:

United States. Defense Advanced Research Projects Agency.

论题主题:

Semiconductors-Testing-Congresses.

论题主题:

Silicon-Testing-Congresses.

论题主题:

Spectrum analysis-Congresses.

论题主题:

Surfaces (Technology)-Analysis-Congresses.

中图法分类号:

TN34-53

一般附注:

"Supported by the Defense Advanced Research Projects Agency and National Bureau of Standards."

一般附注:

"Contains the proceedings of the ARPA/NBS workshop IV, Surface analysis for silicon devices, held at the National Bureau of Standards on April 23-24, 1975."

书目附注:

Includes bibliographical references and index.

豆瓣简介：