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题名/责任者:

Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A. / editors, R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg.

出版发行项:

New York : North-Holland, c1983.

ISBN:

0444007822

载体形态项:

xiii, 298 p. : ill. ; 24 cm.

丛编说明:

Materials research society symposia proceedings ; v. 17

个人责任者:

Osgood, R. M.

附加个人名称:

Osgood, R. M.

附加个人名称:

Brueck, S. R. J.

附加个人名称:

Schlossberg, H. R.

附加团体名称:

United States. Air Force. Office of Scientific Research.

论题主题:

Lasers-Industrial applications-Congresses.

论题主题:

Semiconductors-Congresses.

中图法分类号:

TN24

一般附注:

"Sponsored by the Air Force Office of Scientific Research"--T.p. verso.

书目附注:

Includes bibliographical references and indexes.

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