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题名/责任者:

Sputtering by particle bombardment / edited by R. Behrisch ; with contributions by H.H. Andersen ... [et al.].

出版发行项:

Berlin ; New York : Springer-Verlag, 1981-c1991.

ISBN:

0387105212 (v. 1 : U.S.)

ISBN:

3540125930 (v. 2 : Berlin)

ISBN:

3540105212 (v. 1 : Berlin)

ISBN:

0387125930 (v. 2 : U.S.)

载体形态项:

3 v. : ill. ; 24 cm.

附加非控制题名:

Particle bombardment.

丛编题名:

Topics in applied physics ; v. 47, 52, 64

个人责任者:

Behrisch, Rainer

附加个人名称:

Behrisch, Rainer.

附加个人名称:

Andersen, Hans Henrik.

论题主题:

Sputtering (Physics)

论题主题:

Solids-Effect of radiation on.

论题主题:

Surfaces (Physics)-Effect of radiation on.

中图法分类号:

O48

书目附注:

Includes bibliographical references and indexes.

内容附注:

1. Physical sputtering of single-element solids -- 2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography -- 3. Characteristics of sputtered particles, technical applications.

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