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题名/责任者:

Electron-beam technology in microelectronic fabrication / edited by George R. Brewer ; contributors, J. P. Ballantyne ... [et al.]

出版发行项:

New York : Academic Press, 1980.

ISBN:

012133550X

载体形态项:

xi, 362 p. : ill. ; 24 cm.

个人责任者:

Brewer, George Raymond

附加个人名称:

Brewer, George Raymond, 1922-

附加个人名称:

Ballantyne, J. P.

论题主题:

Microelectronics.

论题主题:

Lithography, Electron beam.

中图法分类号:

TN405

书目附注:

Includes bibliographical references and index.

豆瓣简介：