机读格式显示(MARC)

• 000 01007cam a2200265 a 4500

• 001 0000335299

• 003 CAL

• 005 20200821161400.0

• 008 730827s1973 nyua b 101 0 eng

• 010 __ |a 73014789 //r84

• 020 __ |a 0306307561

• 040 __ |d SCT |c WUL

• 090 __ |a TN3-532/I61

• 093 __ |a TN3-532 |2 3rd

• 099 __ |a CAL 022000371003

• 111 2_ |a International Conference on Ion Implantation in Semiconductors and Other Materials |n (3rd : |d 1972 : |c Yorktown Heights, N.Y.)

• 245 10 |a Ion implantation in semiconductors and other materials : |b proceedings of the conference, Dec. 11-14, 1972 / |c edited by Billy L. Crowder.

• 260 __ |a New York ; |a London : |b Plenum Press, |c 1973.

• 300 __ |a xii, 657 p. : |b ill. ; |c 26 cm.

• 490 0_ |a The IBM research symposia series

• 504 __ |a Includes bibliographical references and index.

• 650 _0 |a Semiconductors |v Congresses.

• 650 _0 |a Ion implantation |v Congresses.

• 700 1_ |a Crowder, Billy L. |0 CAL n2005051884# |7 ba0yba0y

• 998 __ |a WUL