机读格式显示(MARC)
- 000 01241cam a2200301 a 4500
- 008 981216s1983 nyua b 101 0 eng d
- 040 __ |a SJT |c SJT |d JLU
- 099 __ |a CAL 022000310334
- 245 00 |a Laser diagnostics and photochemical processing for semiconductor devices : |b symposium held November 1982 in Boston, Massachusetts, U.S.A. / |c editors, R.M. Osgood, S.R.J. Brueck, and H.R. Schlossberg.
- 260 __ |a New York : |b North-Holland, |c c1983.
- 300 __ |a xiii, 298 p. : |b ill. ; |c 24 cm.
- 490 0_ |a Materials research society symposia proceedings ; |v v. 17
- 500 __ |a "Sponsored by the Air Force Office of Scientific Research"--T.p. verso.
- 504 __ |a Includes bibliographical references and indexes.
- 650 _0 |a Lasers |x Industrial applications |v Congresses.
- 650 _0 |a Semiconductors |v Congresses.
- 700 1_ |a Osgood, R. M. |0 CAL n2005185375# |7 ba0yba0y
- 700 1_ |a Brueck, S. R. J. |0 CAL n2005031196# |7 ba0yba0y
- 700 1_ |a Schlossberg, H. R. |0 CAL n2005217208# |7 ba0yba0y
- 710 1_ |a United States. |b Air Force. |b Office of Scientific Research.