机读格式显示(MARC)
- 000 01274nam a2200313 a 4500
- 008 880517s1984 ilua b 10110 eng
- 050 00 |a QC793.5.E62 |b P44 1984
- 099 __ |a CAL 022001010158
- 111 2_ |a Pfefferkorn Conference |n (3rd : |d 1984 : |c Ocean City, Md.)
- 245 10 |a Electron optical systems for microscopy, microanalysis & microlithography : |b proceedings of the 3rd Pfefferkorn Conference, held April 9 to 14, 1984, at the Carousel Hotel, Ocean City, MD / |c edited by John J. Hren ... [et al.] ; managing editor, Sudha A. Bhatt.
- 260 __ |a AMF O'Hare [Chicago], IL. U.S.A. : |b Scanning Electron Microscopy, |c c1984.
- 300 __ |a 272, viii p. : |b ill. ; |c 29 cm.
- 504 __ |a Includes bibliographical references and indexes.
- 650 _0 |a Electron optics |x Congresses.
- 650 _0 |a Electron microscopy |x Congresses.
- 650 _0 |a Microchemistry |x Congresses.
- 650 _0 |a Microlithography |x Congresses.
- 650 _0 |a Magnetic lenses |x Congresses.
- 700 1_ |a Hren, John J. |0 CAL n2005111069# |7 ba0yba0y
- 700 1_ |a Bhatt, Sudha A. |0 CAL n2005020351# |7 ba0yba0y