机读格式显示(MARC)

• 000 02884cas a2200637 a 4500

• 001 0000327347

• 003 CAL

• 005 20200706163200.0

• 008 751101d19641982nyubx1p 0 a0eng d

• 010 __ |a 68053979 //r85 |z sn 83011019

• 022 __ |a 0022-5355

• 030 __ |a JVSTAL

• 035 __ |a (OCoLC)1754855

• 040 __ |a MnMULS |c MnMULS |d NSDP |d m.c. |d NSDP |d InU |d NSDP |d WaU |d DLC |d NST |d DLC |d NST |d AIP |d NSDP |d AIP |d NST |d AIP |d DLC |d MH |d DLC |d NST |d MH |d PUL

• 042 __ |a nsdp |a lc

• 050 00 |a TJ940 |b .J67

• 090 __ |a (E)/TB/8

• 093 __ |a (E) |2 5

• 098 __ |a 534B0001 |b 1739

• 099 __ |a CAL 121999007832 |a CAL 022000620564

• 210 0_ |a J. vac. sci. technol.

• 222 _0 |a Journal of vacuum science & technology

• 245 04 |a The Journal of vacuum science and technology.

• 260 __ |a [New York, N.Y.] : |b Published for the American Vacuum Society by the American Institute of Physics, |c 1964-1982.

• 300 __ |a 21 v. : |b ill. ; |c 28 cm.

• 310 __ |a 8 no. a year, |b Jan. 1982-Nov./Dec. 1982

• 321 __ |a 7 no. a year, |b 19 -

• 321 __ |a Bimonthly, |b 1964-1980

• 362 0_ |a Vol. 1, no. 1 (Sept./Oct. 1964)-v. 21, no. 4 (Nov./Dec. 1982).

• 500 __ |a Title from cover.

• 500 __ |a Title varies slightly.

• 510 2_ |a Energy research abstracts |x 0160-3604

• 510 1_ |a SPIN |b 1971-1982

• 510 0_ |a Nuclear science abstracts |x 0029-5612

• 510 2_ |a International aerospace abstracts |x 0020-5842

• 510 0_ |a Engineering index monthly |x 0013-7960

• 510 0_ |a Chemical abstracts |x 0009-2258

• 510 2_ |a Reference sources |x 0163-3546

• 510 2_ |a International packaging abstracts |x 0260-7409

• 510 2_ |a Physics abstracts. Science abstracts. Series A |x 0036-8091 |b 1968-1982

• 510 2_ |a Electrical & electronics abstracts |x 0036-8105 |b 1968-1982

• 510 2_ |a Computer & control abstracts |x 0036-8113 |b 1968-1982

• 510 2_ |a Coal abstracts |x 0309-4979

• 510 2_ |a Engineering index energy abstracts |x 0093-8408

• 510 2_ |a Engineering index bioengineering abstracts |x 0736-6213

• 510 2_ |a Engineering index monthly (1984) |x 0742-1974

• 510 2_ |a Engineering index annual (1968) |x 0360-8557

• 530 __ |a Also available on microfilm.

• 550 __ |a Official publication of the American Vacuum Society.

• 580 __ |a Split into: Journal of vacuum science & technology. A, Vacuum, surfaces and films, and: Journal of vacuum science & technology. B, Microelectronics processing and phenomena.

• 650 _0 |a Vacuum technology |x Periodicals.

• 710 2_ |a American Vacuum Society.

• 710 2_ |a American Institute of Physics.

• 785 16 |t Journal of vacuum science & technology. B, Microelectronics processing and phenomena |x 0734-211X |w (DLC) 83642371 |w (OCoLC)8697479 |w s94-57

• 785 16 |t Journal of vacuum science & technology. A, Vacuum, surfaces, and films |x 0734-2101 |w (DLC) 83643441 |w (OCoLC)8697396 |w s94-513

• 998 __ |a PUL