机读格式显示(MARC)

• 000 01261cam a2200289 a 4500

• 001 0000329502

• 003 CAL

• 005 20200810091500.0

• 008 850814s1985 dcua b 101 0 eng d

• 010 __ |a 85019944 //r86

• 020 __ |a 0841209405

• 040 __ |c SJT

• 050 00 |a TK7874 |b .I5462 1985

• 090 __ |a TN405-53/S919

• 093 __ |a TN405-53

• 099 __ |a CAL 021999670243 |a CAL 022000305352 |a CAL 022000822956

• 100 0_ |a Stroeve, Pieter

• 245 00 |a Integrated circuits : |b chemical and physical processing : developed from the winter symposium / |c sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society, University of California--Davis, March 26-27, 1984 ; Pieter Stroeve, editor.

• 260 __ |a Washington, D.C. : |b American Chemical Society, |c 1985.

• 300 __ |a ix, 348 p. : |b ill. ; |c 24 cm.

• 490 0_ |a ACS symposium series, |x 0097-6156 ; |v 290

• 504 __ |a Includes bibliographical references and indexes.

• 650 _0 |a Integrated circuits |x Very large scale integration |x Design and construction |v Congresses.

• 700 1_ |a Stroeve, Pieter, |d 1945- |0 CAL n2004358831# |7 ba0yba0y

• 710 2_ |a American Chemical Society. |b Division of Industrial and Engineering Chemistry.

• 920 __ |a 222010 |z 1

• 998 __ |a SJT