机读格式显示(MARC)

• 000 00568cam a2200205 a 4500

• 001 0000331000

• 003 CAL

• 005 20200803153700.0

• 008 050920s nyua b 000 0 eng d

• 040 __ |a DLC |c OKentU |d DLC

• 090 __ |a TN405/N532/31

• 093 __ |a TN405 |2 4

• 099 __ |a CALB0220110194305m

• 245 10 |a New process technologies for microelectronics.

• 260 __ |a (S.l. : |b s.n.), |c [19- -?].

• 300 __ |a (185-463) p. : |b ill. ; |c 20 cm.

• 490 0_ |a R. C. A. review $v v31, no2.

• 504 __ |a Includes bibliographical references.

• 920 __ |a 237010 |z 2

• 998 __ |a SDU