机读格式显示(MARC)

• 000 01523cam a2200349 a 4500

• 001 0000333355

• 003 CAL

• 005 20200810144800.0

• 008 830801s1983 njua b 101 0 eng

• 010 __ |a 83082039

• 040 __ |a DLC |c DLC |d DLC |d SCT

• 050 00 |a TK7872.T55 |b S95 1983

• 090 __ |a TM215.3-53/S989

• 093 __ |a TM215.3-53 |2 3

• 099 __ |a CAL 022000306798

• 111 2_ |a Symposium on Silicon Nitride Thin Insulating Films |d (1983 : |c San Francisco, Calif.)

• 245 10 |a Proceedings of the Symposium on Silicon Nitride Thin Insulating Films / |c edited by Vikram J. Kapoor, Herman J. Stein ; [sponsored by] Dielectrics and Insulation and Electronics Divisions.

• 246 30 |a Symposium on Silicon Nitride Thin Insulating Films

• 246 30 |a Silicon nitride thin insulating films

• 260 __ |a Pennington, N.J. : |b Electrochemical Society, |c c1983.

• 300 __ |a ix, 519 p. : |b ill. ; |c 23 cm.

• 490 1_ |a Proceedings ; |v v. 83-8

• 500 __ |a Papers presented at the symposium held May 11-13, 1983 in San Francisco, Calif.

• 504 __ |a Includes bibliographical references and index.

• 650 _0 |a Thin film devices |v Congresses.

• 650 _0 |a Silicon nitride |v Congresses.

• 700 1_ |a Kapoor, Vikram J. |0 CAL n2005122302# |7 ba0yba0y

• 700 1_ |a Stein, Herman J. |0 CAL n2005234824# |7 ba0yba0y

• 710 2_ |a Electrochemical Society. |b Dielectrics and Insulation Division

• 710 2_ |a Electrochemical Society. |b Electronics Division

• 830 _0 |a Proceedings (Electrochemical Society) ; |v v. 83-8.

• 998 __ |a SJT