机读格式显示(MARC)

• 000 01643cam a2200349 a 4500

• 001 0000332958

• 003 CAL

• 005 20200808151100.0

• 008 891219s1990 nyua b 101 0 eng

• 010 __ |a 89082542 //r92

• 020 __ |a 0883187566

• 040 __ |a DLC |c DLC |d DLC

• 050 00 |a TJ940 |b .S87 1990

• 082 00 |a 621.5/5 |2 20

• 090 __ |a TB7-532/A512

• 093 __ |a TB7-532 |2 5

• 099 __ |a CAL 022000222756 |a CAL 022000322715 |a CAL 022000343770

• 110 2_ |a American Vacuum Society

• 245 00 |a Surface conditioning of vacuum systems : |b Los Angeles, CA 1989 / |c editors, Robert A. Langley ... [et al.].

• 260 __ |a New York : |b American Institute of Physics, |c c1990.

• 300 __ |a x, 167 p. : |b ill. ; |c 24 cm.

• 490 0_ |a American Vacuum Society series ; |v 8

• 490 1_ |a Conference proceedings / American Institute of Physics ; |v no. 199

• 500 __ |a "Topical Conference on Surface Conditioning of Vacuum Systems ... held April 3-5, 1989 in Los Angeles, CA ... sponsored by the Plasma Science and Technology Division and the Vacuum Technology Division of the American Vacuum Society"--P. vii.

• 504 __ |a Includes bibliographical references and indexes.

• 650 _0 |a Vacuum technology |v Congresses.

• 700 1_ |a Langley, R. A. |q (Robert A.). |0 CAL n2005135950# |7 ba0yba0y

• 710 2_ |a American Vacuum Society. |b Plasma Science and Technology Division.

• 710 2_ |a American Vacuum Society. |b Vacuum Technology Division.

• 711 2_ |a Topical Conference on Surface Conditioning of Vacuum Systems |d (1989 : |c Los Angeles, Calif.)

• 830 _0 |a AIP conference proceedings (American Institute of Physics) ; |v no. 199.

• 998 __ |a PUL