机读格式显示(MARC)

• 000 00907cas a22002651i 4500

• 001 0000327159

• 005 20200708134100.0

• 008 200005c19919999 br p 0 a1eng d

• 022 __ |a 0734-211X |z 1071-1023

• 040 __ |c BJP

• 041 0_ |a eng

• 044 __ |a US

• 090 __ |a (E)/TB/7

• 093 __ |a TB7

• 099 __ |a CALB122002075729

• 245 10 |a Journal of Vacuum Science & Technology. |n B, |p Microelectronics Processing and Phenomena

• 260 __ |a New York : |b the American Institute of Physics, |c 1983-

• 300 __ |a 1631 |c 28cm

• 310 __ |a 6 times a year

• 362 0_ |a Ser.2,v.9(1991)-

• 500 __ |a Continues: Journal of Vacuum Science & Technology. B, Microelectronics Processing and Phenomena

• 710 2_ |a American Institute of Physics

• 780 11 |t Journal of Vacuum Science & Technology.

• 785 10 |t Journal of Vacuum Science & Technology.B, Microelectronics and Nanometer Structures

• 998 __ |a BJP