机读格式显示(MARC)

• 000 00792nam a2200265 a 4500

• 001 0000333134

• 003 CAL

• 005 20200810091600.0

• 008 981216s1982 nyua b 00110 eng

• 020 __ |a 0306408635

• 040 __ |c SJT

• 050 00 |a TK7874 |b .B73 1982

• 082 0_ |a 621.381/7 |2 19

• 090 __ |a TN405/B864

• 093 __ |a TN405

• 099 __ |a CAL 022000330941

• 100 1_ |a Brodie, Ivor. |0 CAL n2005029526# |7 ba0yba0y

• 245 14 |a The physics of microfabrication / |c Ivor Brodie and Julius J. Muray.

• 260 __ |a New York : |b Plenum Press, |c c1982.

• 300 __ |a xix, 503 p. : |b ill. ; |c 24 cm.

• 504 __ |a Includes bibliographical references and index.

• 650 _0 |a Microelectronics.

• 650 _0 |a Thin-film circuits.

• 700 1_ |a Muray, Julius J. |0 CAL n2005175785# |7 ba0yba0y

• 998 __ |a SJT