机读格式显示(MARC)

• 000 01240cam a2200289 a 4500

• 001 0000328775

• 003 CAL

• 005 20200806141600.0

• 008 860211s1986 waua b 10100 eng

• 010 __ |a 86070358

• 020 __ |a 0892526580 (pbk.)

• 040 __ |c PUL

• 050 00 |a TK7871.85 |b .A349 1986

• 082 0_ |a 621.3815/2 |2 19

• 090 __ |a TN29-53/S124

• 093 __ |a TN29-53

• 099 __ |a CAL 022000200536 |a CAL 022000351017

• 100 0_ |a Sadana, Devendra K.

• 245 00 |a Advanced processing and characterization of semiconductors III : |b 22-24 January 1986, Los Angeles, California / |c Devendra K. Sadana, Michael I. Current, chairmen/editors ; presented in cooperation with American Association of Physicists in Medicine ... [et al.].

• 260 __ |a Bellingham, Wash., USA : |b SPIE--the International Society for Optical Engineering, |c c1986.

• 300 __ |a vi, 272 p. : |b ill. ; |c 28 cm.

• 440 _0 |a Proceedings of SPIE--the International Society for Optical Engineering ; |v v. 623

• 504 __ |a Includes bibliographies and index.

• 650 _0 |a Semiconductors |x Design and construction |x Congresses.

• 700 1_ |a Sadana, Devendra K. |0 CAL n2005212678# |7 ba0yba0y

• 710 2_ |a Society of Photo-optical Instrumentation Engineers.

• 998 __ |a PUL