机读格式显示(MARC)

• 000 00561cam a2200205 a-4500

• 001 0000331576

• 003 CAL

• 005 20200805104900.0

• 008 __ s1982 us 000 0 eng d

• 020 __ |a 0O5353/005 |c RMB4.20

• 040 __ |a NEN |c NEN

• 090 __ |a TG17/D561

• 093 __ |a TG17

• 099 __ |a CALB0220110028916m

• 100 1_ |a Dieleman,J. |4 edited

• 245 00 |a Proceedings of the third symposium on plasma processing |c J. Dieleman edited

• 260 __ |a Pennington |b The Electro-Chemical Society Inc. |c 1982

• 300 __ |a 516p. |c 23cm.

• 920 __ |a 222190 |z 2

• 998 __ |a NEN