机读格式显示(MARC)

• 000 01818cam a2200397 a 4500

• 001 0000331781

• 003 CAL

• 005 20200813143700.0

• 008 760218s1976 dcua b f101 0 eng

• 010 __ |a 76608043

• 040 __ |a DLC |c DLC |d DLC |d SCT

• 050 00 |a QC100 |b .U57 no. 400-23 |a TK7871.85

• 090 __ |a TN34-53/U58/4

• 093 __ |a TN34-53 |2 3

• 099 __ |a CAL 022000286784 |a CAL 022003124927

• 110 0_ |a United States. |b National Bureau of Standards.

• 245 00 |a ARPA/NBS workshop IV : |b surface analysis for silicon devices / |c [edited by] A. George Lieberman.

• 246 1_ |a ARPA/NBS workshop 4

• 246 1_ |a ARPA/NBS workshop four

• 246 10 |a Surface analysis for silicon devices

• 260 __ |a Washington : |b U.S. Dept. of Commerce, National Bureau of Standards ; [for sale by the Supt. of Docs., Govt. Print. Off.], |c 1976.

• 300 __ |a vii, 239 p. : |b ill. ; |c 27 cm.

• 440 _0 |a Semiconductor measurement technology

• 490 1_ |a NBS special publication ; 400-23

• 500 __ |a "Supported by the Defense Advanced Research Projects Agency and National Bureau of Standards."

• 500 __ |a "Contains the proceedings of the ARPA/NBS workshop IV, Surface analysis for silicon devices, held at the National Bureau of Standards on April 23-24, 1975."

• 504 __ |a Includes bibliographical references and index.

• 650 _0 |a Semiconductors |x Testing |v Congresses.

• 650 _0 |a Silicon |x Testing |v Congresses.

• 650 _0 |a Spectrum analysis |v Congresses.

• 650 _0 |a Surfaces (Technology) |x Analysis |v Congresses.

• 700 1_ |a Lieberman, A. George |q (Alfred George), |d 1937- |0 CAL n2005142016# |7 ba0yba0y

• 710 1_ |a United States. |b National Bureau of Standards.

• 710 1_ |a United States. |b Defense Advanced Research Projects Agency.

• 830 _0 |a NBS special publication ; |v 400-23.

• 998 __ |a PUL