机读格式显示(MARC)
- 000 01328cam a2200289 a 4500
- 008 981216s1986 waua b 10100 eng
- 020 __ |a 0892526467 (pbk.)
- 090 __ |a TN249-53/P963/611
- 099 __ |a CAL 022000311969
- 245 00 |a Laser processing of semiconductors and hybrids : |b 21-22 January 1986, Los Angeles, California / |c Edward J. Swenson, chairman/editor ; presented in cooperation with American Association of Physicists in Medicine ... [et al.].
- 260 __ |a Bellingham, Wash., USA : |b SPIE--the International Society for Optical Engineering, |c c1986.
- 300 __ |a vi, 101 p. : |b ill. ; |c 28 cm.
- 440 _0 |a Proceedings of SPIE--the International Society for Optical Engineering ; |v v. 611
- 490 1_ |a Eighteenth in the SPIE critical reviews of technology series
- 504 __ |a Includes bibliographies and index.
- 650 _0 |a Integrated circuits |x Design and construction |x Congresses.
- 650 _0 |a Lasers |x Industrial applications |x Congresses.
- 700 1_ |a Swenson, Edward J. |0 CAL n2005240365# |7 ba0yba0y
- 710 2_ |a American Association of Physicists in Medicine.
- 710 2_ |a Society of Photo-optical Instrumentation Engineers.
- 830 _0 |a SPIE critical reviews of technology series ; |v 18th.