机读格式显示(MARC)

• 000 01526cam a2200361 a 4500

• 001 0000328402

• 003 CAL

• 005 20200810144900.0

• 008 810317m19811991gw a b 001 0 eng

• 010 __ |a 81004313 //r922

• 020 __ |a 0387105212 (v. 1 : U.S.)

• 020 __ |a 3540125930 (v. 2 : Berlin)

• 020 __ |a 3540105212 (v. 1 : Berlin)

• 020 __ |a 0387125930 (v. 2 : U.S.)

• 040 __ |a DLC |c DLC |d DLC |d SCT |d JLU

• 090 __ |a O48/B421/1

• 090 __ |a O48/B421/2

• 100 1_ |a Behrisch, Rainer

• 093 __ |a O48 |2 3

• 099 __ |a CAL 022000285893 |a CAL 021999646060 |a CAL 021999646061 |a CAL 021999625321 |a CAL 022000689902

• 245 00 |a Sputtering by particle bombardment / |c edited by R. Behrisch ; with contributions by H.H. Andersen ... [et al.].

• 260 __ |a Berlin ; |a New York : |b Springer-Verlag, |c 1981-c1991.

• 300 __ |a 3 v. : |b ill. ; |c 24 cm.

• 440 _0 |a Topics in applied physics ; |v v. 47, 52, 64

• 504 __ |a Includes bibliographical references and indexes.

• 505 0_ |a 1. Physical sputtering of single-element solids -- 2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography -- 3. Characteristics of sputtered particles, technical applications.

• 650 _0 |a Sputtering (Physics)

• 650 _0 |a Solids |x Effect of radiation on.

• 650 _0 |a Surfaces (Physics) |x Effect of radiation on.

• 740 0_ |a Particle bombardment.

• 700 1_ |a Behrisch, Rainer. |0 CAL n2005016628# |7 ba0yba0y

• 700 1_ |a Andersen, Hans Henrik. |0 CAL n2005005279# |7 ba0yba0y

• 998 __ |a PUL