机读格式显示(MARC)

• 000 00867cam a2200253 a 4500

• 001 0000328551

• 003 CAL

• 005 20200723174600.0

• 008 981216s1980 nyua b 001 0 eng d

• 020 __ |a 012133550X

• 040 __ |c SJT |d JLU

• 090 __ |a TN405/B847

• 093 __ |a TN405 |2 5

• 099 __ |a CAL 022000330957

• 100 1_ |a Brewer, George Raymond

• 245 00 |a Electron-beam technology in microelectronic fabrication / |c edited by George R. Brewer ; contributors, J. P. Ballantyne ... [et al.]

• 260 __ |a New York : |b Academic Press, |c 1980.

• 300 __ |a xi, 362 p. : |b ill. ; |c 24 cm.

• 504 __ |a Includes bibliographical references and index.

• 650 _0 |a Microelectronics.

• 650 _0 |a Lithography, Electron beam.

• 700 1_ |a Brewer, George Raymond, |d 1922- |0 CAL n2004516248# |7 ba0yba0y

• 700 1_ |a Ballantyne, J. P. |0 CAL n2005011644# |7 ba0yba0y

• 998 __ |a SJT