机读格式显示(MARC)
- 000 00847pam a2200265 a 4500
- 008 981214s1984 njua b 000 0 eng
- 050 00 |a TA2020 |b .P53 1984
- 099 __ |a CAL 022000308981
- 245 00 |a Plasma processing of materials / |c edited by H. J. Oskam.
- 260 __ |a Park Ridge, N.J. : |b Noyes Publications, |c c1984.
- 300 __ |a ix, 268 p. : |b ill. ; |c 25 cm.
- 500 __ |a Studies prepared for the U.S. Dept. of the Navy Office of Naval Research.
- 504 __ |a Includes bibliographical references.
- 650 _0 |a Plasma engineering.
- 700 1_ |a Oskam, H. J. |q (Hendrik Jan). |0 CAL n2005185412# |7 ba0yba0y
- 710 1_ |a United States. |b Office of Naval Research.